Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Femtosecond Laser Pulse-Train Induced Breakdown in Fused Silica: the Role of Seed Electrons

Different Tendencies of Breakdown Threshold on Pulse Duration in the Subpicosecond Regime in Fused Silica

A Two-Step Model for Multiple Picosecond and Femtosecond Pulses Ablation of Fused Silica

Optical Breakdown For Silica And Silicon With Double Femtosecond Laser Pulses

Interaction between sub-picosecond laser and fused silica

Transient Electron Temperature and Density Changes in Water Breakdown Induced by Femtosecond Laser Pulses

Effects of Key Pulse Train Parameters on Electron Dynamics During Femtosecond Laser Nonlinear Ionization of Silica

Direct Observation of the Reversible and Irreversible Processes in Femtosecond Laser-Irradiated Fused Silica at the Near-Damage-threshold Fluence

Theoretical Analysis of Fs-Laser Induced Micro-Explosion in Fused Silica

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Ablation Mechanism of Fused Silica under Femtosecond Laser Pulse

Threshold of Femtosecond Laser-Induced Damage in Transparent Materials

Spatiotemporal Probe into the Femtosecond Laser Processing of Fused Silica

Femtosecond Laser Processing of Fused Silica and Aluminum Based on Electron Dynamics Control by Shaping Pulse Trains

Optical Breakdown Versus Filamentation in Fused Silica by Use of Femtosecond Infrared Laser Pulses

Ultrafast Process Characterization of Laser-Induced Damage in Fused Silica Using Pump-Probe Shadow Imaging Techniques

Mechanisms In Fs-Laser Ablation In Fused Silica

Adjustments of Dielectrics Craters and Their Surfaces by Ultrafast Laser Pulse Train Based on Localized Electron Dynamics Control

Simple Model for Optical Breakdown Threshold for Water Induced by Pulse Laser

The ablation process induced by femtosecond laser in transparent dielectrics

Controllable Photon Energy Deposition Efficiency in Laser Processing of Fused Silica by Temporally Shaped Femtosecond Pulse: Experimental and Theoretical Study