Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Different Tendencies of Breakdown Threshold on Pulse Duration in the Subpicosecond Regime in Fused Silica

Interaction between sub-picosecond laser and fused silica

Femtosecond Laser Pulse-Train Induced Breakdown in Fused Silica: the Role of Seed Electrons

Optical Breakdown For Silica And Silicon With Double Femtosecond Laser Pulses

Quantitative Measurement of Electron Number in Nanosecond and Picosecond Laser-Induced Air Breakdown

Optical Breakdown Versus Filamentation in Fused Silica by Use of Femtosecond Infrared Laser Pulses

Effect of Sample Position on Collinear Femtosecond Double-Pulse Laser-Induced Breakdown Spectroscopy of Silicon in Air

Direct Observation of the Reversible and Irreversible Processes in Femtosecond Laser-Irradiated Fused Silica at the Near-Damage-threshold Fluence

A Two-Step Model for Multiple Picosecond and Femtosecond Pulses Ablation of Fused Silica

Threshold of Femtosecond Laser-Induced Damage in Transparent Materials

Signal Enhancement and Mechanism Analysis of Pulse Shaped Femtosecond Laser-Induced Breakdown Spectroscopy of Fused Silica

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Experimental Study on 800 Nm Femtosecond Laser Ablation of Fused Silica in Air and Vacuum

Beam Collapse and Refractive Index Changes Inside Fused Silica Induced by Loosely Focused Femtosecond Laser

Experiment-based quantitative analysis of picosecond pulse induced morphological changes in fused silica

Transient Electron Temperature and Density Changes in Water Breakdown Induced by Femtosecond Laser Pulses

Analysis of electron momentum relaxation time in fused silica using a tightly focused femtosecond laser pulse

Femtosecond Breakdown and Pre-Breakdown Behavior in Thin Dielectric Films

Nonlinear energy absorption during optical breakdown in bulk dielectrics

Subwavelength periodic plasma structures formed during the laser-pulse-induced breakdown within the transparent dielectric

Mechanisms In Fs-Laser Ablation In Fused Silica