Abstract:Erbium-doped fiber lasers exhibit high coherence and low noise as required for applications in fiber optic sensing, gyroscopes, LiDAR, and optical frequency metrology. Endowing Erbium-based gain in photonic integrated circuits can provide a basis for miniaturizing low-noise fiber lasers to chip-scale form factor, and enable large-volume applications. Yet, while major progress has been made in the last decade on integrated lasers based on silicon photonics with III-V gain media, the integration of Erbium lasers on chip has been compounded by large laser linewidth. Recent advances in photonic integrated circuit-based high-power Erbium-doped amplifiers, make a new class of rare-earth-ion-based lasers possible. Here, we demonstrate a fully integrated chip-scale Erbium laser that achieves high power, narrow linewidth, frequency agility, and the integration of a III-V pump laser. The laser circuit is based on an Erbium-implanted ultralow-loss silicon nitride Si$_3$N$4$ photonic integrated circuit. This device achieves single-mode lasing with a free-running intrinsic linewidth of 50 Hz, a relative intensity noise of $<$-150 dBc/Hz at $>$10 MHz offset, and output power up to 17 mW, approaching the performance of fiber lasers and state-of-the-art semiconductor extended cavity lasers. An intra-cavity microring-based Vernier filter enables wavelength tunability of $>$ 40 nm within the C- and L-bands while attaining side mode suppression ratio (SMSR) of $>$ 70 dB, surpassing legacy fiber lasers in tuning and SMRS performance. This new class of low-noise, tuneable Erbium waveguide laser could find applications in LiDAR, microwave photonics, optical frequency synthesis, and free-space communications. Our approach is extendable to other wavelengths, and more broadly, constitutes a novel way to photonic integrated circuit-based rare-earth-ion-doped lasers.

A single frequency fiber laser with an on-chip high-Q silicon microring cavity

Microlaser based on a hybrid structure of a semiconductor nanowire and a silica microdisk cavity.

Narrow Linewidth Single Frequency Fiber Laser Based on High-Q Silicon Nitride Microring Reflector

Electro-optic tuning of a single-frequency ultranarrow linewidth microdisk laser

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Coherent mode-combined ultra-narrow-linewidth single-mode micro-disk laser

A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

Toward On-Chip Unidirectional and Single-Mode Polymer Microlaser

Fiber-Integrated Reversibly Wavelength-Tunable Nanowire Laser Based on Nanocavity Mode Coupling.

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Hertz-linewidth Hybrid Integrated Laser Based on High-Q Si3N4 Microring Reflectors

On-chip erbium-doped lithium niobate microcavity laser

Single-frequency Q-switched erbium-doped fiber ring laser by combination of a distributed Bragg reflector laser and a Mach-Zender interferometer

A fully hybrid integrated Erbium-based laser

An Erbium-Doped Fiber Whispering-Gallery-Mode Microcavity Laser

Self Q-switched single-frequency all-fiber laser

Sub-kHz linewidth 1.6-μm single-frequency fiber laser based on a heavily erbium-doped silica fiber

Single-frequency narrow-linewidth Tm-doped fiber laser using silicate glass fiber

A Sub-kHz Narrow-Linewidth, and Hundred-mW High-Output-Power Silicon-Based Er Silicate Laser with Hybrid Pump and Signal Co-Resonant Cavity

On-chip Lithium Niobate Heterogeneous Photonic Crystal Nanocavity Laser

An Erbium-doped fiber laser based on a 3×3 microfiber coupler