Abstract:Erbium-doped fiber lasers exhibit high coherence and low noise as required for applications in fiber optic sensing, gyroscopes, LiDAR, and optical frequency metrology. Endowing Erbium-based gain in photonic integrated circuits can provide a basis for miniaturizing low-noise fiber lasers to chip-scale form factor, and enable large-volume applications. Yet, while major progress has been made in the last decade on integrated lasers based on silicon photonics with III-V gain media, the integration of Erbium lasers on chip has been compounded by large laser linewidth. Recent advances in photonic integrated circuit-based high-power Erbium-doped amplifiers, make a new class of rare-earth-ion-based lasers possible. Here, we demonstrate a fully integrated chip-scale Erbium laser that achieves high power, narrow linewidth, frequency agility, and the integration of a III-V pump laser. The laser circuit is based on an Erbium-implanted ultralow-loss silicon nitride Si$_3$N$4$ photonic integrated circuit. This device achieves single-mode lasing with a free-running intrinsic linewidth of 50 Hz, a relative intensity noise of $<$-150 dBc/Hz at $>$10 MHz offset, and output power up to 17 mW, approaching the performance of fiber lasers and state-of-the-art semiconductor extended cavity lasers. An intra-cavity microring-based Vernier filter enables wavelength tunability of $>$ 40 nm within the C- and L-bands while attaining side mode suppression ratio (SMSR) of $>$ 70 dB, surpassing legacy fiber lasers in tuning and SMRS performance. This new class of low-noise, tuneable Erbium waveguide laser could find applications in LiDAR, microwave photonics, optical frequency synthesis, and free-space communications. Our approach is extendable to other wavelengths, and more broadly, constitutes a novel way to photonic integrated circuit-based rare-earth-ion-doped lasers.

An Erbium-doped fiber laser based on a 3×3 microfiber coupler

Modeling Rare-Earth Doped Microfiber Ring Lasers

Demonstration of Microfiber Knot Laser

Microfiber Knot Dye Laser Based on the Evanescent-Wave-Coupled Gain

Multifrequency Erbium-Doped Fiber Laser Operating at Room Temperature

Fiber-coupled microsphere laser

Stable Multi-Wavelength Erbium-Doped Fiber Laser Based on Dispersion-Shifted Fiber and Sagnac Loop Filter

Femtosecond Mode-locked Fiber Laser at 1 Μm Via Optical Microfiber Dispersion Management

A fully hybrid integrated Erbium-based laser

Demonstration of Multiwavelength Erbium-Doped Fiber Laser Based on a Microfiber Knot Resonator

A single frequency fiber laser with an on-chip high-Q silicon microring cavity

Er‐Activated Hybridized Glass Fiber for Laser and Sensor in the Extended Wavebands

Single-frequency linear cavity erbium-doped fiber laser for fiber-optic sensing applications

Linear cavity erbium-doped fiber laser employing PM-PCF based Sagnac loop comb filter for wavelength tunable laser generation

1.1-Kw Ytterbium Monolithic Fiber Laser with Assembled End-Pump Scheme to Couple High Brightness Single Emitters

Widely Tunable Compact Erbium-Doped Fiber Ring Laser for Fiber-Optic Sensing Applications

Multiwavelength Linear-Cavity Fiber Laser Source Using a Sagnac Interferemetric Filter and a Strain-Induced Chirped Fiber Grating

Versatile and widely tunable mid-infrared erbium doped ZBLAN fiber laser

Efficient 2075-nm laser emission from Ho3+-doped fluorotellurite glass in a compact all-fiber structure

Widely tunable single-frequency Er-doped ZBLAN fiber laser with emission from 3.37 to 3.72 µm