Pixel-based absolute surface metrology by three flat test with shifted and rotated maps

Dede Zhai,Shanyong Chen,Shuai Xue,Ziqiang Yin
DOI: https://doi.org/10.1016/j.optlaseng.2017.10.021
IF: 5.666
2018-01-01
Optics and Lasers in Engineering
Abstract:•We present a novel three flat test based on shift-rotation.•No assumptions and interpolations to test surface are required.•A pixel level spatial resolution can be achieved.•Analysis to shift error is presented.•Simulations and experimental absolute results are given.
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