High resistive via localization using electro optical techniques

Song Jinrong,Fan Diwei,Guo Xue,He Chi
DOI: https://doi.org/10.1109/IPFA.2017.8060132
2017-01-01
Abstract:Electro optical techniques including EOFM (Electro Optical Frequency Mapping) and EOP (Electro Optical Probe) are common dynamic optical probing techniques used during failure analysis. This paper demonstrated two real cases to show the application of these techniques on the fault isolation of high resistive vias.
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