Optimized N-Type Amorphous Silicon Window Layers Via Hydrogen Dilution For Silicon Heterojunction Solar Cells By Catalytic Chemical Vapor Deposition

R. J. Chen,Liping Zhang,W. Liu,Zhuopeng Wu,Fanying Meng,Zhengxin Liu
DOI: https://doi.org/10.1063/1.5005511
IF: 2.877
2017-01-01
Journal of Applied Physics
Abstract:A comprehensive study of the microstructures and properties of n-type hydrogenated amorphous silicon (n-a-Si:H) films, deposited by catalytic chemical vapor deposition, for the window layers of silicon heterojunction (SHJ) solar cells is presented. With increasing hydrogen-to-silane dilution ratio (R-H), the deposited films first become dense, after which they loosen. With further increases in R-H, the films tend to crystallize with native post-oxidization. The doping efficiencies of phosphorus in the various n-a-Si: H films are similar, but the upper surface doping levels of the films are affected by R-H. The post-oxidized n-a-Si: H film is more transparent at short wavelengths than a dense film deposited at low R-H, exhibiting an external quantum efficiency gain of 20% at 300 nm. Finally, a higher efficiency and short-circuit current density (J(sc)) are obtained with the post-oxidized n-type a-Si: H window layer; a J(sc) gain of 0.25 mA/cm(2) and an efficiency increase of 0.36% were achieved for the optimized SHJ solar cell. At the device level, a dense intrinsic a-Si-H passivated layer is beneficial for suppressing fill-factor (FF) deterioration. The natively post-oxidized n-a-Si: H window layer is a potential choice for improving J(sc) by apparently enhancing light absorption in crystalline silicon at short wavelengths. Published by AIP Publishing.
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