Athermal and Cmos-Compatible Flat-Topped Silicon Mach-Zehnder Filters

Qingzhong Deng,Rui Zhang,Lu Liu,Xinbai Li,Jurgen Michele,Zhiping Zhou
DOI: https://doi.org/10.1109/group4.2016.7739077
2016-01-01
Abstract:A CMOS-compatible athermal flat-topped silicon Mach-Zehnder filter is proposed and experimentally demonstrated using hybrid strip-slot waveguides. The measured temperature-dependent wavelength shift is −5 pm/K and the minimum insertion loss is 0.4 dB with a device dimensions of 170 pm × 580 pm.
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