Athermal and flat-topped silicon Mach-Zehnder filters.

Qingzhong Deng,Lu Liu,Rui Zhang,Xinbai Li,Jurgen Michel,Zhiping Zhou
DOI: https://doi.org/10.1364/OE.24.029577
IF: 3.8
2016-01-01
Optics Express
Abstract:Athermal and flat-topped transmissions are the two main requirements for a silicon WDM filter. A Mach-Zehnder (MZ) filter which simultaneously satisfies these two requirements has been experimentally demonstrated in this paper. A combination of strip waveguide and hybrid strip-slot waveguide is introduced for athermalization, and two-stage interference is utilized for flat-topped transmission. The temperature dependent wavelength shift is measured to be similar to-5 pm/K while the best 1 dB bandwidth is 5.5 nm with 14.7 nm free spectral range (FSR). The measured minimum insertion loss is only 0.4 dB with a device dimension of 170 mu m x 580 mu m. Moreover, Such a MZ filter is compatible with the state-of-art CMOS-fabrication process and its minimum feature size is as large as 200 nm. (C) 2016 Optical Society of America
What problem does this paper attempt to address?