Experimental and computational studies on the refractive index and interface state for nano interface of SiO<inf>2</inf>/Si and Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf>/Si

Li-mei Rong,Bo Liu,Zhi-jun Meng,Kui Liu,Qi Yu,Yang Liu
DOI: https://doi.org/10.1109/INEC.2016.7589274
2016-01-01
Abstract:The refractive index and the interface state were studied for SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /Si and Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> /SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /Si using ellipsometry and the conductance method. The local optical performance of interface structure is modeled and calculated by layered capacitors method. The fitting ellipsometry dates agreed with its measurement and the calculate date of refractive index cross the SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /Si interface showed the similar trend with the results of ellipsometry. And the correlation between the thickness of the interface structure, the oxidation state, the refractive index, and the interface state is analyzed.
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