Research on reference vibration for a two-axis piezoelectric micro-machined gyroscope
Yipeng Lu,Xiaosheng Wu,Weiping Zhang,Wenyuan Chen,Feng Cui,Wu Liu
DOI: https://doi.org/10.1088/0960-1317/20/7/075039
2010-01-01
Journal of Micromechanics and Microengineering
Abstract:This paper presents a new method for vibratory gyroscopes. A novel special vibration is presented, and when it is taken as a reference vibration, the device can sense two-axis angular velocity. It has a simple structure without suspending structures and high resistance to shock. In addition, an effective driving method is proposed which realizes a desired reference vibration for sensing two-axis angular velocities. The operation principle and coupling effects of our device are analyzed. For improving the sensitivity of the device, the optimal structure (4 mm x 4 mm x 3 mm) and the optimal reference vibration (with a driving frequency of 260.8 kHz and an effective velocity of 20 589.241 mu m s(-1)) are found. We obtain the methods to monitor the desired reference vibration, which are crucial for compensating errors and ensuring the high sensitivity and accuracy of the device. Furthermore, the driving and detecting circuit is designed and a printed circuit board is fabricated. The fabrication process of our device and its output results are given. By a comparison of the measurement and simulation results, the optimal reference vibration of the fabricated device is obtained.