Study on a Micro-Array Sensor for Laser Receiving and Emitting

陈非凡,苑京立,陈益峰
DOI: https://doi.org/10.3321/j.issn:1002-1582.2002.05.029
2002-01-01
Abstract:A novel integrated micro-array sensor for laser receiving and emitting is presented. This system is integrated with MOEMS technology. Its structure is reliable. The size is small and the weight is light. A real sensor is made according to the design . It performs very well in the experiments and the accuracy of communication exceeds 99%.
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