Study of Self-organized InAs/GaAs Quantum-dots Using Double Crystal X-ray Diffraction

刘艳美,赵宗彦,杨坤堂,徐章程,韩家骅
DOI: https://doi.org/10.3969/j.issn.1673-2812.2003.06.022
2003-01-01
Abstract:Rocking curves of self-organized dots InAs/GaAs are measured using double crystal x-ray diffraction. The composition, strain and thickness of InAs quantum dot layer are obtained by theoretical simulations of the rocking curves based on the Takagi-taupin equations of dynamical diffraction theory. To obtain agreement between theory and experiment, submonolayer deposited InAs quantum dots should be consided as chemical compound InGaAs, not as superlattice of InAs/GaAs when simulations are performed. The vertical lattice mismatch of the InAs QDs layer with respect to GaAs is around 5~6% which is agreeable to macroscopic continuum elasticity, while the lattice mismatch in the QW is very samll. It is explained that the simulation results are rational with reference to atomic force microscopy and transmission electron microscopy images.
What problem does this paper attempt to address?