Abstract:Controlled growth, patterning and placement of carbon nanotube (CNT) thin films for electronic applications are demonstrated. The density of CNT films is controlled by optimizing the feed gas composition as well as the concentration of growth catalyst in a chemical vapor deposition process. Densities of CNTs ranging from 0.02 CNTs/{\mu}m^2 to 1.29 CNTs/{\mu}m^2 are obtained. The resulting pristine CNT thin films are then successfully patterned using either pre-growth or post-growth techniques. By developing a layered photoresist process that is compatible with ferric nitrate catalyst, significant improvements over popular pre-growth patterning methods are obtained. Limitations of traditional post-growth patterning methods are circumvented by selective transfer printing of CNTs with either thermoplastic or metallic stamps. Resulting as-grown patterns of CNT thin films have edge roughness (< 1 {\mu}m) and resolution (< 5 {\mu}m) comparable to standard photolithography. Bottom gate CNT thin film devices are fabricated with field-effect mobilities up to 20 cm^2/Vs and on/off ratios of the order of 10^3. The patterning and transfer printing methods discussed here have a potential to be generalized to include other nanomaterials in new device configurations.

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Rapid Growth of Well-Aligned Carbon Nanotube Arrays

Uniform Patterned Growth of Carbon Nanotubes Without Surface Carbon

Synthesis of Vertically Aligned Carbon Nanotube Arrays on Silicon Substrates

Synthesis of Well-Aligned Carbon Nanotube Network on a Gold-Patterned Quartz Substrate

Selective Growth of Carbon Nanotube on Silicon Substrates

J2240204 Evaluation of the Properties and Alignment of Carbon Nanotube Sheet Grown by CVD Method

Substrate morphology induced self-organization into carbon nanotube arrays, ropes, and agglomerates.

Preferential Growth of Carbon Nanotubes/Nanofibers Using Lithographically Patterned Catalysts

Patterning and growth of carbon nanotubes on a highly structured 3D substrate surface

Multi-Directional Growth of Aligned Carbon Nanotubes Over Catalyst Film Prepared by Atomic Layer Deposition

Chemical Vapor Deposition Growth of Well-Aligned Carbon Nanotube Patterns on Cubic Mesoporous Silica Films by Soft Lithography

Well-aligned Carbon Nanotube Array Grown on Si-based Nanoscale SiO2 Islands

Substrate-Site Selective Growth of Aligned Carbon Nanotubes

Vertically aligned carbon nanotube arrays grown on a lamellar catalyst by fluidized bed catalytic chemical vapor deposition

Synthesis of Locally-Ordered Carbon Nanotube Arrays from Patterned Catalyst by Self-Assembly Technique

The Fabrication And Characterization Of N-Doped Aligned Carbon Nanotube Arrays In Large Area

Layered Growth of Aligned Carbon Nanotubes Arrays on Silicon Wafers

Large Scale Synthesis of Vertical Aligned CNT Array on Irregular Quartz Particles

Film growth of pillars of multi-walled carbon nanotubes

Controlled Growth, Patterning and Placement of Carbon Nanotube Thin Films