Study on SOI-based Photonic Crystal Waveguides

解灵运,张冶金,彭小舟,陈向飞,谢世钟
DOI: https://doi.org/10.3969/j.issn.1001-5868.2003.06.005
2003-01-01
Abstract:Design and fabrication techniques for SOI-based photonic bandgap structures (PBG) and photonic crystal waveguides are presented. A method incorporating plane wave expansion (PWE) technique based on supercell with finite-difference time-domain (FDTD) technique based on full-vector is used. Photonic crystals and waveguide devices suitable for 248 nm deep UV lithography and 0.18 μm ion-beam etching are designed and optimized.
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