InP heterostructure photonic crystal waveguide fabricated by high-aspect-ratio ICP etching

Kaiyu Cui,Yongzhuo Li,Xue Feng,Fang Liu,Yidong Huang,Wei Zhang
DOI: https://doi.org/10.1109/CLEOPR.2013.6600391
2013-01-01
Abstract:InP heterostructure photonic crystal waveguide (PCW) is fabricated by ICP etching with high-aspect-ratio of 45. Structure-dependent transmission-dip about 17dB and micro-photoluminescence linewidth of only 73nm are demonstrated in a 17μm-long heterostructure PCW.
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