Growth behavior,dielectric property and microstructure of PZT nanofilms
ZHU Xin-hua,ZHU Jian-min,ZHOU Shun-hua,LIU Zhi-guo,MIN Nai-ben
DOI: https://doi.org/10.3969/j.issn.1000-6281.2008.05.002
2008-01-01
Abstract:By sol-gel spin coating method ferroelectric lead zirconate titanate(PZT)nano-films with a thickness of 25 nm were deposited onto Si substrates coated by nanoporous alumina membranes(NAM)with an average pore size of 25 nm,and Au nanowires were embedded in NAM as a part of bottom electrode.The growth behavior,surface morphology,and microstructure of PZT nano-films were characterized by X-ray diffraction(XRD),scanning electron microscopy(SEM),and field-emission transmission electron microscopy(FE-TEM).The XRD results show that the PZT film grew with an(111)preferential orientation.It had a fine and dense grain structure,and most PZT grains exhibited an elliptical morphology,as revealed by SEM images.Cross-sectional TEM images demonstrated that the PZT nano-films contacted directly with the Au nanowires and the interface between them had some certain degree of waviness.Some Au nanowires branched at the ends of nanowires after post-annealing the PZT nano-films.Dielectric data of the PZT nano-films demonstrated that the dielectric constant decreased from 760 to 100 in the frequency region below 104 Hz,and then remained almost constant of 100 as increasing the frequency up to 106 Hz.Such a decrease of the dielectric constant in the low frequency region was due to the relaxation of space charge polarization,which was related to the charge accumulation at the interfaces between the film and the(bottom and top)electrodes,especially at the wavy interface between the PZT nano-film and the Au nanowires.The space charge polarization mechanism was also revealed by the appearance of a dielectric loss peak near 4 000 Hz,which originates from the maximum electrical energy being transferred to the oscillations of the space charges as the frequency of the applied electric field close to the resonance frequency of the space charges.