RESEARCH ON THE LiNbO3 THIN FILMS PREPARED BY SOL-GEL PROCESS

张一兵,翁文剑,杜丕一,沈鸽,韩高荣,叶志镇
DOI: https://doi.org/10.3321/j.issn:0454-5648.2002.02.019
2002-01-01
Abstract:The recent researches on LiNbO 3 thin films prepared by sol-gel processes is described in this paper. The main influences of factors, including Li and Nb-raw materials, solvents, stablizers, substrates, viscosity of solutions, methods and technology of coating films, dry and heat treatment of the films, on the formation and properties of LiNbO 3 films are briefly described. It is shown that high_quality LiNbO 3 thin films for optical applications can be prepared on substrates (such as sapphire and LiTaO 3 in which there is small lattice mismatch between substrate) by sol-gel method. The temperature of heat treatment for the films is usually about 500 ℃. The main existing problems in preparing LiNbO 3 thin films, the research directions and development prospects are also discussed.
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