SOLGEL PREPARATION OF Li∶ZnO FILMS FOR SURFACE ACOUSTIC WAVE DEVICES

丁卫华,翁文剑,程逵,杜丕一,沈鸽,韩高荣
DOI: https://doi.org/10.3321/j.issn:0454-5648.2003.06.006
2003-01-01
Abstract:Li∶ZnO films on glass sheets were prepared by solgel technique with a two-step heating process. The results of XRD, SEM,AFM and electrical resistance measurement indicate that the Li∶ZnO films with different heating temperatures per layer are characterized by a good c-orientation, smooth and homogeneous surface, dense and small particles and high resistivity (≈10 7Ω·cm). All these properties show that the films can meet the requirements for surface acoustic wave devices. The better properties of the films obtained by the present technique are due to an optimized film microstructure got from the technique.
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