Micrographite-glass thin films for enhanced piezoresistive sensor fabrication
Tahmasb Hatami,Larissa Giorgetti Mendes,Osvaldo Correa,Mara A. Canesqui,Silvia V. G. Nista,Stanislav A. Moshkalev
DOI: https://doi.org/10.1007/s10854-024-13681-3
2024-10-20
Journal of Materials Science Materials in Electronics
Abstract:This article introduces the development of a sensitive piezoresistive sensor utilizing thin films composed of micrographite (MG) and glass. The initial phase of this study involved the synthesize of three distinct glass formulations using the conventional melt-quench technique, incorporating Bi 2 O 3 , ZnO, SiO 2 , and H 3 BO 3 . These glass samples were subsequently subjected to evaluation to determine their coefficients of thermal expansion through dilatometer analysis and their glass transition temperature via differential scanning calorimetry (DSC). Particular emphasis was placed on identifying a formulation that closely matched the coefficient of thermal expansion of alumina, as the substrate, while maintaining a low glass transition temperature. The glass formulation was milled for 6 h, then mixed with micrographite and sodium carboxymethyl cellulose to make a viscous blend. This was spread evenly on an alumina substrate, dried at 70 °C, and sintered at 500 °C for 15 min to make the piezoresistive sensor. The film thickness, surface morphology, and electrical resistance were evaluated using profilometry, Scanning Electron Microscopy (SEM) analysis, and a multimeter employing cantilever clamped beam geometry, respectively. The results indicated a film thickness of 28.63 μm, an average surface roughness of 3.7 μm, consistent dispersion of MG particles within the glassy matrix, and a sensitivity of the piezoresistive film at 0.84 mΩ Ω −1 N −1 within the applied force range of 0 to around 8 N.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied