Flexible pressure sensors with ultrahigh stress tolerance enabled by periodic microslits
Song Wang,Chenying Wang,Yifan Zhao,Yujing Zhang,Yaxin Zhang,Xiangyue Xu,Qijing Lin,Kai Yao,Yuheng Wang,Feng Han,Yu Sun,Zhuangde Jiang
DOI: https://doi.org/10.1038/s41378-023-00639-4
2024-02-08
Microsystems & Nanoengineering
Abstract:Abstract Stress tolerance plays a vital role in ensuring the effectiveness of piezoresistive sensing films used in flexible pressure sensors. However, existing methods for enhancing stress tolerance employ dome-shaped, wrinkle-shaped, and pyramidal-shaped microstructures in intricate molding and demolding processes, which introduce significant fabrication challenges and limit the sensing performance. To address these shortcomings, this paper presents periodic microslits in a sensing film made of multiwalled carbon nanotubes and polydimethylsiloxane to realize ultrahigh stress tolerance with a theoretical maximum of 2.477 MPa and a sensitivity of 18.092 kPa −1 . The periodic microslits permit extensive deformation under high pressure ( e.g ., 400 kPa) to widen the detection range. Moreover, the periodic microslits also enhance the sensitivity based on simultaneously exhibiting multiple synapses within the sensing interface and between the periodic sensing cells. The proposed solution is verified by experiments using sensors based on the microslit strategy for wind direction detection, robot movement sensing, and human health monitoring. In these experiments, vehicle load detection is achieved for ultrahigh pressure sensing under an ultrahigh pressure of over 400 kPa and a ratio of the contact area to the total area of 32.74%. The results indicate that the proposed microslit strategy can achieve ultrahigh stress tolerance while simplifying the fabrication complexity of preparing microstructure sensing films.
nanoscience & nanotechnology,instruments & instrumentation