Research on Manganin Thin Film Transducer Array

Teng Lin,Yang Bangchao,Du Xiaosong
DOI: https://doi.org/10.13382/j.jemi.2005.04.021
2005-01-01
JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT
Abstract:Manganin thin film transducer array aimed at high-pr essure measurement is prepared by thin film technique. In this article, the pr eparation and principle of the transducers are introduced. Under dynamic loadin g, the film array shows good consistency for piezoresistance coefficient and fa st reponse of less than 30ns. No high-pressure induced shunt effect is present ,which indicating the high accuracy and reliability of manganin thin film trans ducer arrays.
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