Two-dimensional van der Waals thin film transistors as active matrix for spatially resolved pressure sensing

Chao Ma,Dong Xu,Peiqi Wang,Zhaoyang Lin,Jingyuan Zhou,Chuancheng Jia,Jin Huang,Shengtao Li,Yu Huang,Xiangfeng Duan
DOI: https://doi.org/10.1007/s12274-021-3717-0
IF: 9.9
2021-09-04
Nano Research
Abstract:The development of pressure sensor arrays capable of distinguishing the shape and texture details of objects is of considerable interest in the emerging fields of smart robots, prostheses, human-machine interfaces, and artificial intelligence (AI). Here we report an integrated pressure sensor array, by combining solution-processed two-dimensional (2D) MoS2 van der Waals (vdW) thin film transistor (TFT) active matrix and conductive micropyramidal pressure-sensitive rubber (PSR) electrodes made of polydimethylsiloxane/carbon nanotube composites, to achieve spatially revolved pressure mapping with excellent contrast and low power consumption. We demonstrate a 10 × 10 active matrix by using the 2D MoS2 vdW-TFTs with high on-off ratio > 106, minimal hysteresis, and excellent device-to-device uniformity. The combination of the vdW-TFT active matrix with the highly uniform micropyramidal PSR electrodes creates an integrated pressure sensing array for spatially resolved pressure mapping. This study demonstrates that the solution-processed 2D vdW-TFTs offer a solution for active-matrix control of pressure sensor arrays, and could be extended for other active-matrix arrays of electronic or optoelectronic devices.
materials science, multidisciplinary,chemistry, physical,physics, applied,nanoscience & nanotechnology
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