Abstract:The micro-electro-mechanical system (MEMS) resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. In this paper, a section parameter is proposed to describe the microbeam changes in the upper and lower sections. The effect of section change on the mechanical properties is studied analytically and verified through numerical and finite element solutions. A doubly-clamped microbeam-based resonator, which is actuated by an electrode on one side, is investigated. The higher-order model is derived without neglecting the effects of neutral plane stretching and electrostatic nonlinearity. Further, the Galerkin method and Newton⁻Cotes method are used to reduce the complexity and order of the derived model. First of all, the influence of microbeam shape and gap variation on the static pull-in are studied. Then, the dynamic analysis of the system is investigated. The method of multiple scales (MMS) is applied to determine the response of the system for small amplitude vibrations. The relationship between the microbeam shape and the frequency response is discussed. Results show that the change of section and gap distance can make the vibration soften, harden, and so on. Furthermore, when the amplitude of vibration is large, the frequency response softening effect is weakened by the MMS. If the nonlinearity shows hardening-type behavior at the beginning, with the increase of the amplitude, the frequency response will shift from hardening to softening behavior. The large amplitude in-well motions are studied to investigate the transitions between hardening and softening behaviors. Finally, the finite element analysis using COMSOL software (COMSOL Inc., Stockholm, Sweden) is carried out to verify the theoretical results, and the two results are very close to each other in the stable region.

Research Progress of RF-MEMS Devices

The Recent Progress of MEMS/NEMS Resonators

Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

A micromachined silicon resonant accelerometer

Resonant Frequency Tunable Silicon Fishbone-Shaped MEMS Double Ended Tuning Fork.

High Sensitivity Micro Electrometer Based On Clamped Free Curved Beams Resonator With Weakened Nonlinearity

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support

High- Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning

Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams

High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO3 Single-Crystal Cantilever Beams

CMOS-MEMS Thermal-Piezoresistive Resonators and Oscillators for Sensors

Viscous damping of nanobeam resonators: humidity, thermal noise and the paddling effect

A Generalized Cmos-Mems Platform For Micromechanical Resonators Monolithically Integrated With Circuits

Research progress of silicon resonant MEMS accelerometer

Electric-Force Conversion Performance of Si-Based LiNbO3 Devices Based on Four Cantilever Beams

Viscous Damping Of Nanobeam Resonators: Humidity, Thermal Noise, And A Paddling Effect

A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator with Selectable Higher Modes

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers

Electromechanical Finite Element Analysis For Designed Low-Frequency Mems Piezoelectric Vibration Energy Harvester