Abstract:Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator with Selectable Higher Modes

Resonant Frequency Tunable Silicon Fishbone-Shaped MEMS Double Ended Tuning Fork.

Double Tuning-Fork Resonant Accelerometer

A New Type of MEMS Accelerometer with Up-Tuning Structure

An Improved-Sensitivity Resonant Accelerometer with Fishbone-Shaped Resonators of Higher Vibration Modes

A Mode-Selectable Beam Resonator Based on Sectionalized Electrodes

A MEMS Resonant Accelerometer with Sensitivity Enhancement and Adjustment Mechanisms

Experimental Verification of Coupling Strength on the Mode-Localization in Single MEMS DETF Resonators and Its Application as a Force Sensor

Electrical Adjustment on a MEMS Double-Ended-tuning-fork Resonator

High Sensitivity Micro Electrometer Based On Clamped Free Curved Beams Resonator With Weakened Nonlinearity

A Mems Piezoelectric In-Plane Resonant Accelerometer With Two-Stage Micro-Leverage Mechanism

A Biaxial Resonant Tilt Sensor with Two-Stage Microleverage Mechanisms

Electrostatic Charge Sensor Based on Micro Resonator with Sensing Scheme of Effective Stiffness Perturbation

A Dual-Driving Piezoelectric DETF Resonator with High Quality Factor and Low Multimode Effect

Sensitivity Manipulation on Micro-Machined Resonant Electrometer Toward High Resolution and Large Dynamic Range

High-Resolution and Large Dynamic Range Electrometer with Adjustable Sensitivity Based on Micro Resonator and Electrostatic Actuator

Micromechanical resonant electrostatic charge sensor with micro-leverage mechanisms

Tunable Micro- and Nanomechanical Resonators

Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support

A micromachined resonant accelerometer

Multi-modal resonance measurement capable of discerning and visualizing effects due to excitation schemes in mems resonator