Study on a Flexoelectric Microphone Using Barium Strontium Titanate

S. R. Kwon,W. B. Huang,S. J. Zhang,F. G. Yuan,X. N. Jiang
DOI: https://doi.org/10.1088/0960-1317/26/4/045001
2016-01-01
Journal of Micromechanics and Microengineering
Abstract:In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm x 768 mu m x 50 mu m BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.
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