Scaling Effect of Flexoelectric (ba,sr)tio3 Microcantilevers

Wenbin Huang,Kyungrim Kim,Shujun Zhang,Fuh-Gwo Yuan,Xiaoning Jiang
DOI: https://doi.org/10.1002/pssr.201105326
2011-01-01
physica status solidi (RRL) - Rapid Research Letters
Abstract:The flexoelectric microcantilever offers an alternative approach for the development of micro/nano‐sensors. The transverse flexoelectric coefficients µ12 of barium strontium titanate microcantilevers were measured at room temperature, and found to keep the same value of 8.5 µC/m for microcantilevers with thickness ranging from 30 µm to 1.4 mm. The calculated effective piezoelectric coefficient and electrical energy density of flexoelectric cantilevers are superior to those of their piezoelectric counterparts, suggesting that the flexoelectricity‐induced polarization can be significantly increased as structures are scaled down due to the scaling effect of strain gradient, holding promise for flexoelectric micro/nano cantilever sensing applications. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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