Flexoelectric Materials And Structures For M/Nems

wenbin huang,kyungrim kim,shujun zhang,fuhgwo yuan,xiaoning jiang
DOI: https://doi.org/10.1115/IMECE2011-64520
2012-01-01
Abstract:Recent research progress on flexoelectricity suggests that dramatic enhancement of effective piezoelectric properties desirable for advanced M/NEMS, in principle, is attainable through flexoelectric (FE) effect and scale effect. In this paper, the transverse flexoelectric coefficient mu(12) of barium strontium titanate (BST) microcantilevers with thicknesses ranging from 1.4 mm down to 30 mu m was measured at room temperature. It was found that mu(12) remains to be constant (8.5 mu C/m) for all fabricated microcantilevers. Effective piezoelectric coefficients of these microcantilevers were also calculated, indicating that significantly increased effective piezoelectric coefficients can be obtained from microcantilevers with thickness of microns and nanometers, which is promising for micro/nano electromechanical systems (M/NEMS).
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