Abstract:In this paper, a nondestructive method for the normal and lateral sensitivity calibrations of the optical lever in atomic force microscope (AFM) is presented. The practical application of this method in a dual-probe AFM is discussed in detail. To calibrate the conversion factors between photodiode responses and probe's deflection angles accurately without applying forces to the probe, a two-degrees-of-freedom flexure-hinge-based calibration device (FHCD) is developed. The device, which mainly consists of two mutually perpendicular flexure-hinge levers that share the same rotational center, serves as a switching mechanism for precise translation-to-rotation conversions both in the normal and lateral directions. During the calibration, a probe is attached to the FHCD at the meeting of the rotational axes of two levers. The FHCD is mounted on an AFM sample platform. The probe in this method acts as a mirror to be normally and laterally tilted at nanoscale angles to deflect the reflected laser beam by twisting the corresponding flexure-hinge levers, rather than the force-inducing probe deflection in traditional AFM calibration methods. With this method, the nondestructive calibration of the local and full-range sensitivities of the optical levers can be completed without destroying the probe tip or modifying the actual system setup of an AFM. Moreover, the nonlinearities of the optical levers are accurately compensated. Experimental results show that the linear ranges (with a deviation of 5% in the full range) of the force measurement are extended to 3.6 and 4.5 times in the normal and lateral directions, respectively, increasing to over 90% of the full range of the force measurement.

A Novel Method and System for Calibrating the Spring Constant of Atomic Force Microscope Cantilever Based on Electromagnetic Actuation.

A novel compliant mechanism based system to calibrate spring constant of AFM cantilevers

Calibration of the Effective Spring Constant of Ultra-Short Cantilevers for A High-Speed Atomic Force Microscope

Calibration of the spring constant of AFM micro-cantilever based on bending method

Improved Calibration System of Micro-Cantilever Spring Constant

Calibration of the Spring Constant of AFM Cantilever

Lateral force calibration for atomic force microscope cantilevers using a suspended nanowire

Improved Calibration Method For Lateral Force Of The Cantilever Deflection Force Sensor In Atomic Force Microscope

An analytic model for accurate spring constant calibration of rectangular atomic force microscope cantilevers

Comparison and Analysis of Different Methods in Calibration of the Spring Constant of AFM Cantilever Probes

Accurate flexural spring constant calibration of colloid probe cantilevers using scanning laser Doppler vibrometry

Calibrate the Non-Orthogonal Error of AFM with Two-Dimensional Self-Traceable Grating.

Research Progress on the Calibration Methods for Elastic Constant of Atomic Force Microscopy Cantilevers

Development and Calibration of a Compact Self-Sensing Atomic Force Microscope Head for Micro-Nano Characterization

Detection for Spring Constant of Microcantilevers in Atomic Force Microscopy Based on Frequency Measurements

Calibration Of Spring Constant Of An Afm Cantilever For The Study On Ligand-Receptor Interaction

A Nondestructive Calibration Method for Maximizing the Range and Accuracy of AFM Force Measurement

Traceable calibration method of cantilever stiffness based on theprinciple of electrostatic force

The multi-position calibration of the stiffness for atomic-force microscope cantilevers based on vibration

Eliminating the effect of acoustic noise on cantilever spring constant calibration

Enhanced Accuracy of Force Application for AFM Nanomanipulation Using Nonlinear Calibration of Optical Levers