An Annealing Process For Mechanical Strength Improvement Of Parylene Micropore-Arrayed Membrane

Han Xu,Wangzhi Dai,Yaoping Liu,Wengang Wu,Wei Wang
DOI: https://doi.org/10.1109/NEMS.2017.8017109
2017-01-01
Abstract:This paper used aneffective annealing process to improve the performance of Parylene C micropore-arrayed membranes fabricated with Parylene C moulding strategy. The results indicated that the annealing treatment at 320 degrees C for 2h in nitrogen sealed the keyholes, which were unavoidably generated in the conventional Parylene C moulding process, because of melting and reflow at high temperature. A chromatic confocal imaging (CCI) based platform was established to test the mechanical properties of the prepared Parylene C micropore-arrayed membranes after annealing treatment, with the one without annealing as comparison. The mechanical testing results demonstrated that the annealing treated Parylene C micropore-arrayed membranes presented 13.4% higher mechanical strength compared to the unannealed one.
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