Mechanical Strength Of 2.5d Parylene C Micropore-Arrayed Filtration Membrane

Wangzhi Dai,Yaoping Liu,Yutong Fu,Han Xu,Fei Su,Jian Wu,Wei Wang
DOI: https://doi.org/10.1109/TRANSDUCERS.2017.7994273
2017-01-01
Abstract:This work experimentally studied the mechanical strength of the previously reported Parylene C based micropore-array membrane with a high porosity. The results indicated that the membrane, though with a high porosity, is strong enough and has a negligible pore size variation (<30 nm) during an up-to 150 mL/min filtration. The equivalent Young's modulus of the 2.5D filtration membrane were extracted preliminarily based on the experimental measurement, compared with theoretical prediction.
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