Abstract:This work discusses the predictable control of plasma-assisted physical vapor deposition (PVD) of coatings. The multiple process parameters and the instability of the nonequilibrium ion plasma system create substantial obstacles to the wide industrial application of promising multicomponent functional coatings. Here we propose a solution to this problem, which includes: creation of a database of diamond-like carbon (DLC) coatings to identify a limited set of adjustable process control parameters, determination of how these parameters affect the coating properties, analysis of the revealed effects using statistical methods and neural network algorithms, and use of the results for the predictable tuning of specified coating properties. The object of research is original DLC coatings whose structure is stabilized with nitrogen instead of conventionally used hydrogen. The experimental database of DLC coatings is created based on our previous studies and includes structural, morphological and architectural characteristics of coatings, various types of substrates, sublayers, physical, mechanical and tribological properties, and various combinations of coating deposition parameters. A specific problem is solved to determine the influence of deposition parameters such as chamber pressure P , stabilizer content (% nitrogen), ion flux rate (coil current λ) and deposition time t on hardness H and elastic modulus E of coatings. Based on the results obtained, the deposition parameters are optimized so as to obtain predictable strength values of the formed carbon coating. The optimization procedure is developed using both classical statistical methods and modern algorithms of ridge regression, randomized trees (ExtraTrees), and a fully connected neural network (multilayer perceptron MLP).

Nitrogen-Stabilized DLC Coatings: Optimization of Properties and Deposition Parameters Using Randomized Tree and Neural Network Algorithms

Parametric optimization of CVD process for DLC Thin film coatings: a comparative analysis

Plackett-Burman experimental design for pulsed-DC-plasma deposition of DLC coatings

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Diamond-Like Carbon Coatings on Plasma Nitrided M2 Steel: effect of deposition parameters on adhesion properties

Doping of rf plasma deposited diamond-like carbon films

Tribological Behaviors of Diamond-Like Carbon Coatings on Plasma Nitrided Steel Using Three BN-containing Lubricants

Mechanical and Surface Characterization of Diamond-Like Carbon Coatings onto Polymeric Substrate

Electrodeposition, microstructure and tribological performance of Ni/(N) incorporated diamond-like carbon films

Excellent Adhered Thick Diamond-Like Carbon Coatings by Optimizing Hetero-Interfaces with Sequential Highly Energetic Cr and C Ion Treatment

Study on Structure and Friction Behaviors of DLC Films Doped Nitrogen

The Formation of Diamond-Like Carbon Structure Anchored in the Nitrided Layer of M50 Steel During Plasma-Assisted Thermochemical Treatment

Optimizing gas pressure for enhanced tribological properties of DLC-coated graphite

Deposition of DLC Film on Stainless Steel Substrates Coated by Nickel Using PECVD Method

Studies of Diamond-Like Carbon Films Prepared by Ion Beam-Assisted Deposition

A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings

Mechanical Properties Evaluation and Parametric Optimization of Atmospheric Plasma Spray NiTi Coating

Diamond-like Carbon Film Synthesized by Ion Beam Assisted Deposition and Its Tribological Properties

Effect of nitrogen (N2) flow rate over the tribological, structural and mechanical properties diamond-like carbon (DLC) thin film

Preparation and Characterization of Diamond-like Carbon Coatings for Biomedical Applications—A Review

Multilayer Diamond‐Like Carbon Films on Monocrystalline Diamond