Abstract:Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended silicon nitride waveguides enables the precise alignment of these waveguides to other photonic integrated circuits (PICs). This requires both in-plane and out-of-plane actuators to ensure high-precision optical alignment. However, most current out-of-plane electrostatic actuators are bulky, while electrothermal actuators consume high power. Thus, piezoelectric actuators, thanks to their moderate actuation voltages and low power consumption, could be used as alternatives. Furthermore, piezoelectric actuators can provide displacements in two opposite directions. This study presents a novel aluminum nitride-based out-of-plane piezoelectric MEMS actuator equipped with a capacitive sensing mechanism to track its displacement. This actuator could be integrated within PICs to align different chips. Prototypes of the device were tested over the range of ±60 V, where they provided upward and downward displacements, and achieved a total average out-of-plane displacement of 1.30 ± 0.04 μm. Capacitance measurement showed a linear relation with the displacement, where at -60 V, the average change in capacitance was found to be -13.10 ± 0.89 fF, whereas at 60 V the change was 11.09 ± 0.73 fF. This study also investigates the effect of the residual stress caused by the top metal electrode, on the linearity of the displacement-voltage relation. The simulation predicts that the prototype could be modified to accommodate waveguide routing above it without affecting its performance, and it could also incorporate in-plane lateral actuators.

Silicon-On-Insulator Out-Of-Plane Electrostatic Actuator with in Situ Capacitive Position Sensing

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A Planar Capacitive Sensor for Large Scale Measurement

A Three-Axis SOI Accelerometer Sensing with Both In-Plane and Vertical Comb Electrodes

A Compliant Three-Axis Force Sensor with Solid–Liquid Hybrid Cover for Prosthetic Fingertip

A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors.

Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes

Compact Electrode Design for an In-Plane Accelerometer on SOI with Refilled Isolation Trench

Design and Fabrication of A Torsional Z-Axis Capacitive Accelerometer with Novel Comb Capacitor

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Two-dimensional Silicon-on-glass Actuator Combined with a Dispensed Polymer Microlens

Poly-Si Based Two-Axis Differential Capacitive-Sensing Accelerometer

A two-dimensional silicon-on-glass actuator with dispensed polymer microlens

Implementation of A Gap-Closing Differential Capacitive Sensing Z-Axis Accelerometer on an Soi Wafer

Electrostatic Comb-Drive Actuator for Mems Relays/Switches with Double-Tilt Comb Fingers and Tilted Parallelogram Beams

Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators

A 3-axis MEMS capacitive accelerometer free of cross axis sensitivity

In-plane-sensing Analysis of Comb-like Capacitive Micro-machined Ultrasonic Transducers (CMUTs) Using Analytical Small-signal Model and FEM

3-axis Capacitive Low-Gravity MEMS Accelerometer with Zero Cross-Axis Sensitivity in a Commercial Process