Abstract:The traditional handmade catalytic combustion gas sensor has some problems such as a pairing difficulty, poor consistency, high power consumption, and not being interchangeable. To address these issues, integrated double catalytic combustion of alcohol gas sensor was designed and manufactured using silicon micro-electro-mechanical systems (MEMS) technology. The temperature field of the sensor is analyzed using the ANSYS finite element analysis method. In this work, the silicon oxide-PECVD-oxidation technique is used to manufacture a SiO2-Si3N2-SiO2 microstructure carrier with a sandwich structure, while wet etching silicon is used to form a beam structure to reduce the heat consumption. Thin-film technology is adopted to manufacture the platinum-film sensitive resistance. Nano Al2O3-ZrO-ThO is coated to format the sensor carrier, and the sensitive unit is dipped in a Pt-Pd catalyst solution to form the catalytic sensitive bridge arm. Meanwhile the uncoated catalyst carrier is considered as the reference unit, realizing an integrated chip based on a micro double bridge and forming sensors. The lines of the Pt thin-film resistance have been observed with an electronic microscope. The compensation of the sensitive material carriers and compensation materials have been analyzed using an energy spectrum. The results show that the alcohol sensor can detect a volume fraction between 0 and 4,500 × 10−6 and has good linear output characteristic. The temperature ranges from −20 to +40 °C. The humidity ranges from 30% to 85% RH. The zero output of the sensor is less than ±2.0% FS. The power consumption is ≤0.2 W, and both the response and recovery time are approximately 20 s.

Structure Optimization of a New Micro-Hotplate Designed for Gas Sensor

Thermal Analysis and Design of A Micro-Hotplate for Sisubstrated Micro-Structural Gas Sensor

An Ultra Low Power Consumption Methane Gas Detector Based on an Optimized Suspended Membrane Microhotplate

Design and Optimization of Micro-Hotplate for Surface Ionization

A low power catalytic combustion gas sensor based on a suspended membrane microhotplate.

Characterization of a Novel Microhotplate for Application in a Silicon-Based Nanofilm Gas Sensor

Study of the Gas Sensor Array Based on Micro-Machined Ceramic Hotplate

Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors

Optimizing Si-substrated Micro-structural Gas Sensor Structure by Finite Element Analysis(FEA)

Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor

Gas Sensor Array Based on Ceramic Micro-Hotplate for Flammable Gas Detection

Novel design and characterisation of SOI CMOS micro-hotplates for high temperature gas sensors

A Micro-Machined Ceramic Hot-Plate for Gas Sensor Applications

Study of high-temperature gas sensor based on ceramic micro-hot-plate

Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography

Development of a Reliable Micro-Hotplate with Low Power Consumption

Design and Experimentation with Sandwich Microstructure for Catalytic Combustion-Type Gas Sensors

Structure Design and Process Improvement of Planar Oxygen Sensor

Design and Thermal Analysis of Gas Pressure Sensor with Micro-Hotplate

Design, Simulation, and Performance Evaluation of a High Temperature and Low Power Consumption Microheater Structure for MOS Gas Sensors

Design and Fabrication of a CMOS-compatible MHP Gas Sensor