Development of a Reliable Micro-Hotplate with Low Power Consumption

Lei Xu,Tie Li,Xiuli Gao,Yuelin Wang
DOI: https://doi.org/10.1109/jsen.2010.2064765
IF: 4.3
2010-01-01
IEEE Sensors Journal
Abstract:In this paper, a reliable micro-hotplate with low power consumption is demonstrated by optimizing its structure and materials. Its power consumption is successfully decreased by adopting a structure with two high length-to-width slender beams. High reliability is achieved by improving its mechanical strength and long-term stability. A stacked membrane with residual stress controlled and corner compensations improve its mechanical strength. Pt heater element and Al2O3 adhesive layer deposited by atomic layer deposition (ALD) improve its long-term stability. Test results indicate that the micro-hotplate consumes only 18 mW when heated up to 400 degrees C with a heating response time <5 ms and cooling response time <3 ms. It can sustain at least 842 400 circles pulsed-mode operation with ultra-low resistance drift and can continuously work stably at around 450 degrees C for at least 500 h.
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