Abstract:In this article, the origin of severe drain–source current kink effect in $\beta $ -Ga $_{\text{2}}$ O $_{\text{3}}$ MOSFETs has been exploited by means of temperature-and pulse-dependent current–voltage ( $\textit{I}$ – $\textit{V}\text{)}$ analysis. By reducing the pulse biasing widths, whereby the self-heating effect was negligible, the output characteristics were free of kink but with a rather low drain–source current density ( $\textit{I}_{\text{\text{DS}}}\text{)}$ at a high drain voltage ( $\textit{V}_{\text{\text{DS}}}\text{)}$ of 30 V. The current kink effect started to occur with a direct-current power consumption of approximately 850 mW/mm. The elimination of kink features was also observed together with a large $\textit{I}_{\text{\text{DS}}}$ at elevated temperatures over 100 $^{\circ}$ C. These observations indicate that the kink effect is strongly related to thermal activation of incomplete ionized donors by either the self-heating effect or external intentional heating stress rather than high electric field. In terms of temperature-dependent current output characteristics, the thermal activation energy is determined to be 136 meV, which is consistent with the reported unintentional donors with a high activation energy of 110 meV. It implies that additional electrons are thermally activated and emitted from the incomplete ionized donors in $\beta $ -Ga $_{\text{2}}$ O $_{\text{3}}$ channel or buffer layers through the self-heating effect, contributing to the channel conductivity modulation and the consequent current kink effect. These findings may bridge the knowledge gap between charge transport mechanisms and the reliability degradation of $\beta $ -Ga $_{\text{2}}$ O $_{\text{3}}$ power switches.

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