Investigation of Inrush Current Induced Trench Gate Degradation inside SiC MOSFET by New Fowler- Nordheim Localization Methodology
Hanqing Zhao,Xuan Li,Yifan Wu,Rui Yang,Qian Lou,Lingfeng Li,Xiaochuan Deng,Bo Zhang
DOI: https://doi.org/10.1109/tpel.2023.3348871
IF: 5.967
2024-01-01
IEEE Transactions on Power Electronics
Abstract:In this letter, an inrush current degradation mechanism of trench gate inside silicon carbide (SiC) metal-oxide-semiconductor-field-effect transistor (Mosfet) is investigated in depth under different turn-off VGS. The preconditioning is introduced to guarantee the accuracy of gate-related parameters, avoiding effect from recoverable components. Meanwhile, a new FowlerNordheim localization method is proposed to nondestructively evaluate degradation extent of gate oxide on channel and nonchannel region by achieving barrier height B of hole and electron, respectively. The degradation mechanism is the substantial hole injection into gate oxide on channel region due to the electric field direction and high hole density resulting from negative VGS and inrush current, respectively. The degradation mechanism provides significant physical insights to better understand the impact of different turn-off VGS and safely use SiC mosfet in practical circuits. The proposed methodology also provides novel general guidance for nondestructively, assessing the quality of gate oxide of channel and nonchannel region under various operation conditions.
engineering, electrical & electronic