Abstract:A kind of 0degrees-90degrees tilting micro-mirror with fiber holding structures monolithically, which is composed of a metal-coated polysilicon or single crystal silicon film, is fabricated by the MEMS process technology based on regular silicon wafers as well as SOI wafers using the mixed micromachining of surface and bulk silicon microelectronics. According to the scalar scattering theory, a mathematical model, which describes the effects of the surface roughness on reflectivity and scattering, is constructed to analyze the optical properties of micro-mirrors. Then the surface roughness of a series of micro-mirrors with different coated metals is measured by the AFM. The diffraction effect of etching holes and the optical power transmission through MEMS multi-layer membranes are analyzed in theory preliminarily. To characterize the dynamic response of the micro-mirrors and optimize the design of driving system, a novel reduced order model of micro-mirrors is brought forward to fulfilled the mechanics-electrics coupling simulation to verify the theoretical analysis and the experimental results easily. Based on the investigation on theory, simulation and experiments together, some ameliorated processing methods of producing the micro-mirrors are advanced to improve the total performances.

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