Fabrication of Metal Micro Needle Array by LIGA Process

wan qing bai,yi gui li,chun sheng yang,jing quan liu,dan nong he,susumu sugiyama
DOI: https://doi.org/10.4028/www.scientific.net/AMR.418-420.1911
2012-01-01
Abstract:Polymer materials, such as PMMA and PDMS, have been of great interest in the research and development of MEMS recently due to their relatively low cost and easy process. In this research, we are trying to fabricate Ni Micro needle array from PMMA master by through PDMS mold based on multi-mold transformation technology. The fabricated micro nickel needles' array is 900 microneedles in 1 cm(2) chip area and the height of each needle is about 150um.
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