Fabrication of densely arrayed micro-needles with flow channels by mechanical dicing and anisotropic wet etching

Mitsuhiro Shikida,Takehiko Hasada,Kazuo Sato

DOI: https://doi.org/10.1088/0960-1317/16/8/039

2006-07-20

Journal of Micromechanics and Microengineering

Abstract:We previously proposed a novel fabrication process, which is a combination of mechanical dicing and anisotropic wet etching, to reduce the cost of MEMS devices, and applied it to fabricate various solid micro-needle arrays in transdermal drug delivery systems [1, 2]. This paper discusses new fabrication processes we developed to produce flow channels in these micro-needle arrays. We fabricated two different types of points for the needle arrays, i.e., pyramidal and pen shaped, by multiplying the number of dicing and wet etching process. The height of the pyramidal needles was 120 µm and that of the pen pointed was 550 µm. Both their pitches were 370 µm. We believe that the processes we developed to produce flow channels in these micro-needle arrays will be useful for producing disposable injection devices for medical applications.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied