Charge and Mobility Enhancements in In-Polar InAl(Ga)N/Al(Ga)N/GaN Heterojunctions Grown by Metal–Organic Chemical Vapor Deposition Using a Graded Growth Strategy

Jing Lu,Yan-Ling Hu,David F. Brown,Feng Wu,Stacia Keller,James S. Speck,Steven P. DenBaars,Umesh K. Mishra
DOI: https://doi.org/10.1143/jjap.51.115502
IF: 1.5
2012-01-01
Japanese Journal of Applied Physics
Abstract:In this paper, we investigated the Ga incorporation effect in InAl(Ga)N/Al(Ga)N/GaN heterojunctions grown by a close coupled showerhead metal–organic chemical vapor reactor and proposed a grading growth strategy, where the indium composition was graded from Al(Ga)N to InAl(Ga)N, to mitigate the deleterious effect of Ga carry-over on the transport properties of two dimensional electron gas (2DEG). In contrast to non-graded samples grown by conventional growth strategy without grading, hall measurements revealed significant charge and mobility enhancements for the graded samples, with an electron mobility of 1300 cm2 V-1 s-1, a sheet charge density of 2.35 ×1013 cm-2 and a resultant low sheet resistance of 205 Ω/□ compared to the non-graded sample with an low sheet charge density of 1.4 ×1013 cm-2 and mobility of 1100 ±50 cm2 V-1 s-1. The reason of the enhancements were then analyzed by transmission electron microscopy (TEM) and atom probe techniques, which revealed that grading strategy led to a higher average Al composition in the barrier layer.
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