MEMS mirrors based on a curved concentric electrothermal actuator

lin liu,sagnik pal,huikai xie

DOI: https://doi.org/10.1016/j.sna.2012.03.021

2012-01-01

Abstract:A curved concentric electrothermal actuator has been designed and developed to actuate circular micromirrors with improved area efficiency, while at the same time achieving large scan range at low voltage. This actuator consists of three curved concentric Aluminum/Tungsten bimorphs for fast thermal response and high responsivity, and two rigid frames connected in between for scan range amplification. A tip–tilt–piston micromirror with a circular mirror plate based on this actuator design has been proposed and fabricated. The mirror is capable of scanning ±11° at 0.6V, and generating a 227μm piston displacement at only 0.8V. The measured lateral shift and tilt angle of the mirror plate are less than 7μm and 0.7°, respectively, through the entire piston displacement. A piston-only micromirror has also been demonstrated, and it has even smaller lateral shift of less than 3μm and tilt of less than 0.4° through the piston scan range. This mirror generates large vertical displacement of about 200μm at only 0.9V.