Abstract:The advent of aberration-corrected transmission electron microscopy in 1998 [1] has provided materials science with entirely new tools for quantitative investigations. Four key innovations have to be mentioned: (1) The possibility to operate the electron microscope as a variable-sphericalaberration instrument allows to derive a new phase contrast theory optimizing both resolution and point spread [2]. In classical Scherzer phase contrast theory the radius of the point spread disc amounts to three times the Scherzer resolution limit. Besides the fact that information is lost by placing an aperture in the diffraction plane to keep the contrast oscillations in the contrast transfer function from affecting the images this point spread is a second disadvantage of the classical Scherzer approach to phase contrast. Both limitations can be substantially reduced in a new theory in which by both the objective lens defocus Z as well as C S the spherical aberration parameter adopt specific values. As a result the resolution limit coincides with the information limit and the point spread gets reduced to about one half of the latter making it an uncritical parameter in practice. (2) The negative spherical aberration imaging (NCSI) technique leads to enhanced contrast of atoms with low nuclear charge number [3]. It relies on two advantages compared to the classical Zernike technique. The shift of the phase of the diffracted waves is, in contrast to the classical Scherzer technique, in clockwise direction leading to white atom contrast. Furthermore the contrast is enhanced by a dynamic non-linear effect. Oxygen, nitrogen and even boron can be imaged directly even when these atomic species occur in close distance to heavy cations. (3) Essentially point-spread-free atomic images allow to measure occupancies of atomic columns, i.e. local concentrations, with lateral atomic resolution evaluating atomically resolved intensity measurements [4]. This means that high-resolution is not only a structural technique. From now on also local composition maps can be derived which are forming an excellent starting point for ab-initio calculations of interface-, boundary- and defect structures. (4) Measurements of atomic distances can be carried out at an accuracy of a few picometers

Atomic Structure Imaging Using an Aberration-Corrected Transmission Electron Microscope

Quantitative High-Resolution Transmission Electron Microscopy of Single Atoms

Atomic studies on ferroelectric oxides by aberration corrected transmission electron microscopy

Progress in Atomic-Resolution Aberration Corrected Conventional Transmission Electron Microscopy (CTEM)

High-Resolution Imaging with an Aberration-Corrected Transmission Electron Micrscope

The Limits of Resolution and Dose for Aberration-Corrected Electron Tomography

Progress in Aberration-Corrected High-Resolution Transmission Electron Microscopy of Crystalline Solids

Electron ptychography achieves atomic-resolution limits set by lattice vibrations

Seeing Inside Materials by Aberration-Corrected Electron Microscopy

Electron ptychography of 2D materials to deep sub-ångström resolution

Atomic-scale Study of Nanocatalysts by Aberration-Corrected Electron Microscopy.

Scanning Transmission Electron Microscopy of Nanostructures

Origin of atomic resolution on metal surfaces in scanning tunneling microscopy

Atomic Imaging Using Secondary Electrons in a Scanning Transmission Electron Microscope : Experimental Observations and Possible Mechanisms

Atomic Resolution Imaging of Oxygen Atoms Close to Heavy Atoms by HRTEM and ED, Using the Superconductor SmFeAsO0.85F0.15 As an Example.

Electron tomography at 2.4 Å resolution

Effective Object Planes for Aberration-Corrected Transmission Electron Microscopy

Atom-by-atom Chemical Identification from Scanning Transmission Electron Microscopy Images in Presence of Noise and Residual Aberrations.

Atomic Resolution Phase Contrast Imaging and In-Line Holography Using Variable Voltage and Dose Rate.

Negative Spherical Aberration Ultrahigh-Resolution Imaging in Corrected Transmission Electron Microscopy

B23-O-04Probing the Atomic and Electronic Structure in Materials Through Aberration-Corrected Scanning Transmission Electron Microscopy