Quantitative Evaluation of Focal Series in HRTEM

A. Thust,K. Tillmann,M. Lentzen,C.L. Jia,K. Urban
DOI: https://doi.org/10.1017/s1431927603012248
IF: 4.0991
2003-01-01
Microscopy and Microanalysis
Abstract:Due to the fact that the information limit of modern mid-voltage high-resolution electron microscopes reaches or even surpasses the 1 Angstrom limit, the precise control of the objective lens aberrations becomes more and more crucial in order to obtain directly interpretable results. Such lens aberrations must be either hardware-corrected before the experiment or can be determined and removed after the experiment by software in the case of phase-retrieval methods. Apart from the frequently discussed anisotropic residual aberrations like coma, twoand three-fold astigmatism, also the allowed tolerance in the "classical" isotropic defocus aberration has to be reconsidered critically when approaching the 1 Angstrom limit.
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