A quantitative method for measuring small residual beam tilts in high-resolution transmission electron microscopy.

Wenquan Ming,Jianghua Chen,Christopher S Allen,Shiyun Duan,Ruohan Shen
DOI: https://doi.org/10.1016/j.ultramic.2017.10.005
IF: 2.994
2018-01-01
Ultramicroscopy
Abstract:•We propose a quantitative method for measuring small beam tilts in HRTEM.•Experimentally the method shows a rather good accuracy in measuring beam tilts.•It is shown that a small tilt of about 0.1° often exists in the microscopes at operation.
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