Abstract:High-resolution transmission electron microscopy (HRTEM) images are usually not directly interpretable in terms of crystal structure due to various aberrations in the microscope lenses. Although significant progress has been made recently in the development of hardware aberration correctors, especially spherical-aberration correctors [1], the majority of transmission electron microscopes in use today are traditional ones and structure reconstruction by software methods still serves as a cost-effective alternative. Representative software methods include exit wave reconstruction using throughfocus image series [2] and contrast transfer function (CTF) correction methods using single images or image series [3]. Here we present a CTF-correction based structure reconstruction method, using throughfocus series of HRTEM images taken with a fixed focus step, in which all images in the series are corrected for CTFs and combined into a structure image. To determine the starting defocus of the series, trial defocus values in a large range are tested and CTF corrections are made to all images. The similarity of the phases of the Fourier transform between the corrected images is used as the criterion to judge whether a trial defocus value is close to the true one. The two-fold astigmatism is determined by dividing Fourier transforms into sectors and determining the defocus along different directions. As crystallographic phases are used in defocus and astigmatism determination, no amorphous areas are required in the images. On the other hand, since CTF correction is done for all pixels within the resolution limit in reciprocal space, this method works for both perfect and defect crystals. The method was applied on a 20-image focal series of Ca0.28Ba0.72Nb2O6 (P4bm, a=12.43Å, c=3.96Å). The experimental images were collected with a focus step of -26.6 Å on a JEOL-2100F transmission electron microscope equipped with field emission gun. The starting defocus of the series is determined to be -260 Å and the two-fold astigmatism is 33 Å with an azimuth angle of 13° clockwise with respect to the x-axis of the images. The reconstructed image is shown in the figure below, in which atoms appear as black dots. Not only metals but also atomic columns as light as oxygen can be seen. The present method has the advantages of automatic defocus and two-fold astigmatism determination without amorphous areas, less CTF crossover problems and improved signal-to-noise ratio as compared to CTF correction methods using single images. The method has been implemented in a user-friendly program, QFocus, which we hope may help non-TEM experts to use HRTEM images for solving their structure problems.

Direct Estimation and Correction of Residual Aberrations in the Reconstructed Exit-Wavefunction of a Crystalline Specimen

Qfocus: Structure Reconstruction from Focal Series of Hrtem Images

Progress in Aberration-Corrected High-Resolution Transmission Electron Microscopy of Crystalline Solids

An Improved Iterative Wave Function Reconstruction Algorithm in High-Resolution Transmission Electron Microscopy.

High-Resolution Imaging with an Aberration-Corrected Transmission Electron Micrscope

Aberration-corrected STEM Imaging of 2D Materials: Artifacts and Practical Applications of Threefold Astigmatism.

Exit wave reconstruction of a focal series of images with structural changes in high‐resolution transmission electron microscopy

Design of Electrostatic Aberration Correctors for Scanning Transmission Electron Microscopy

Aberration on Excitation Focal Spot Caused by Oblique Interface with Refractive Indices Discontinuous and Its Correction with Pure‐phase Compensation for Laser Scanning Microscopy

Effective Object Planes for Aberration-Corrected Transmission Electron Microscopy

Spherical aberration correction in a scanning transmission electron microscope using a sculpted foil

Numerical correction of anti-symmetric aberrations in single HRTEM images of weakly scattering 2D-objects

Atomic studies on ferroelectric oxides by aberration corrected transmission electron microscopy

Aberration corrected STEM by means of diffraction gratings

An improved image alignment procedure for high-resolution transmission electron microscopy.

Simulation Study of the Atomic Resolution Secondary Electron Imaging

Wavefront-aberration Measurement and Systematic-Error Analysis of a High Numerical-Aperture Objective

Image simulation for atomic resolution secondary electron image.

Negative Spherical Aberration Ultrahigh-Resolution Imaging in Corrected Transmission Electron Microscopy

Applications of Aberration Corrected TEM and Exit Wavefunction Reconstruction to Materials Science

Seeing Inside Materials by Aberration-Corrected Electron Microscopy