On the Out-of-plane Deformation of V-shaped Micromachined Beams

CF Tsou,HL Yin,WL Fang
DOI: https://doi.org/10.1088/0960-1317/11/2/311
2001-01-01
Journal of Micromechanics and Microengineering
Abstract:V-shaped beams are widely applied for the suspension of the sensors, fiber holders, and the suspension arms of atomic force microscopes. The performance of the V-shaped beam is highly dependent upon its initial out-of-plane deflection. This paper reports on the exploration of the out-of-plane deformation of V-shaped micromachined beams. A finite element model has been established to predict the deformation of a V-shaped micromachined beam. The fabrication and characterization of various shapes of SiO2 V-shaped micromachined beams has been performed to observe the out-of-plane deformation caused by residual stress. With the difference between the analytical and experimental results, an etching process dependent mechanism has been discussed. Thus the design criteria to fabricate a flat V-shaped beam is accomplished.
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