Control the Shape of Buckling Micromachined Beam Using Plasma Chemistry Bonding Technology

Wang Shen Su,Sheng Ta Lee,Cheng Yu Lin,Ming Chuen Yip,Ming Shih Tsai,Weileun Fang
DOI: https://doi.org/10.1143/jjap.45.8479
IF: 1.5
2006-01-01
Japanese Journal of Applied Physics
Abstract:In this study, we report a novel method for controlling the shape of a micromachined bridge (clamped-clamped beam) by plasma surface modification. In short, the microbridge can be tuned to either buckle upward or downward using plasma treatment. To demonstrate the feasibility of this approach, NH3 plasma treatments were employed to control the direction of buckling amplitude for a SiO2 microbridge. Furthermore, the, shape of a buckling microbridge can also be adjusted by the same technique. The buckling profiles predicted by finite element analysis are in agreement with those determined from the measurement.
What problem does this paper attempt to address?