The Effect of Residual Stresses on the Deformation of Semi-Circular Micromachined Beams

CF Tsou,WL Fang
DOI: https://doi.org/10.1088/0960-1317/10/1/306
2000-01-01
Journal of Micromechanics and Microengineering
Abstract:In this research, a semi-circular micromachined beam is proposed in order to reduce the out-of-plane deformation caused by the residual stresses. The side view of the semi-circular beam is similar to that of a cantilever, whereas the end conditions are similar to those of the microbridge. Although the micromachined cantilever will not be deformed by the residual mean stress, it is significantly bent by the residual gradient stress. On the other hand. the microbridge will not be bent by the gradient residual stress, but is buckled by the mean compression. Analytical and experimental results demonstrate that the out-of-plane deformation due to bending and buckling is significantly reduced for the semi-circular micromachined beam. Thus, the flatness of the micromachined suspensions is improved. The more traditional techniques in which the out-of-plane deformation is reduced, by lowering the net residual stresses of thin films, can be supplemented by the use of the semi-circular micromachined beam.
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