Two Modified Coherent Gradient Sensing Methods for Slope Measurement of Reflective Surfaces

Kang Ma,Huimin Xie,Jianguo Zhu

DOI: https://doi.org/10.1088/0957-0233/25/12/125202

2014-01-01

Abstract:In this work, we propose two novel methods for the measurement of the slope of reflective surfaces, namely phase-shift based coherent gradient sensing: both a three-step and four-step phase shifting method are deduced theoretically and the full-field phase value can be calculated accurately by three or four inteferograms. Using these two methods, the automatic process of the fringes can be realized and the experimental results show that the relative errors of the curvature measurement with both methods are less than 5%. These successful results verify the feasibility of these methods, and both have a good potential to be utilized for measuring the slope, curvature, and shape of a thin film/substrate system.